Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena

American Vacuum Society

`container_type`	`journal`
`issne`	`2327-9877`
`issnl`	`0734-211X`
`issnp`	`0734-211X`
`name`	`Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena`
`publication_status`
`publisher`	`American Vacuum Society`
`wikidata_qid`	`Q29043658`

`country`	`us`
`ezb`	`{'color': 'red', 'ezb_id': '743'}`
`kbart.clockss`	`{'year_spans': [[2000, 2000], [2008, 2008]]}`
`publisher_type`	`society`
`urls`	`https://avs.scitation.org/journal/jvb`

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