Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena
container_yqvauio6tjf2jbut55thtniv5y
American Vacuum Society
Entity Edit History
This table only shows accepted edits included in the catalog, not any work-in-progress.| Changelog | Editgroup | Description |
|---|---|---|
| #5639030
2021-12-01 01:29 |
journal-metadata-bot
editgroup_kmskj3o72beajfxog6ixen3ysq
[view]
| Automated import of container-level metadata from Chocula tool. |
| #4619427
2020-08-05 18:39 |
journal-metadata-bot
editgroup_pl4kfufoizbfhp5mibsasjsxpe
[view]
| Automated import of container-level metadata from Chocula tool. |
| #2953145
2019-09-04 00:51 |
journal-metadata-bot
editgroup_2f6ne76b6jc3hn5k2gwoy6xpqe
[view]
| Automated import of container-level metadata from Chocula tool. |
| #2571696
2019-05-30 23:23 |
journal-metadata-bot
editgroup_4axmyrinxza7jfizi2wrqh6hfu
[view]
| Automated import of container-level metadata, by ISSN. Metadata from Internet Archive munging. |
| #335
2019-01-31 00:11 |
journal-metadata-bot
editgroup_25koqrb4mvcptbrvpwnwvxr3mi
[view]
| Automated import of container-level metadata, by ISSN. Metadata from Internet Archive munging. |