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Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena container_yqvauio6tjf2jbut55thtniv5y

American Vacuum Society

Homepage URLs

https://avs.scitation.org/journal/jvb

Example Publications

12,225
Known Releases
Preservation Summary [more]
1,173 preserved and accessble (bright)
573 preserved, inaccessible (dark)
10,479 no known preservation
Release Types
article-journal 12,225
Publication Type  journal
Country Code  us
ISSN-L?  0734-211X
    Print:  0734-211X
    Electronic:  2327-9877
Wikidata  Q29043658
Directory Listings
Not in DOAJ
Lookup Links
ISSN Portal
The Keepers Registry (preservation)
SHERPA/RoMEO (access policies)
Catalog Record
Revision: cfda050f-d3ef-40c4-8c78-6faf4656f01a
API URL: JSON