Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

American Vacuum Society

`container_type`	`journal`
`issne`
`issnl`	`1071-1023`
`issnp`
`name`	`Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena`
`publication_status`
`publisher`	`American Vacuum Society`
`wikidata_qid`

`abbrev`	`J Vac Sci Technol B Microelectron Nanometer Struct Process Meas Phenom`
`country`	`us`
`ia.sim`	`{'peer_reviewed': True, 'pub_type': 'Scholarly Journals', 'scholarly_peer_reviewed': True, 'sim_pubid': '38085', 'year_spans': [[1983, 2010]]}`
`issne`	`1520-8567`
`issnp`	`1071-1023`
`kbart.clockss`	`{'year_spans': [[2000, 2000], [2008, 2008]]}`
`kbart.hathitrust`	`{'year_spans': []}`
`languages`	`['en']`
`publisher_type`	`society`
`urls`	`http://ieeexplore.ieee.org/servlet/opac?punumber=4915583`

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