Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
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American Vacuum Society
Entity Edit History
This table only shows accepted edits included in the catalog, not any work-in-progress.| Changelog | Editgroup | Description |
|---|---|---|
| #4871207
2020-10-09 02:13 |
journal-metadata-bot
editgroup_ic72ivetineezdlvt5irzsfozq
[view]
| Automated import of container-level metadata from Chocula tool. |
| #4619047
2020-08-05 18:37 |
journal-metadata-bot
editgroup_khz6tyewxbganeruajeattlxn4
[view]
| Automated import of container-level metadata from Chocula tool. |
| #75
2019-01-31 00:10 |
journal-metadata-bot
editgroup_mexa6p7vorchtjsrqevejarh4a
[view]
| Automated import of container-level metadata, by ISSN. Metadata from Internet Archive munging. |