Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

This page summarizes and visualizes the article-level (or output-level) preservation status for a single publication venue (Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena). Fatcat is a preservation-oriented catalog, and metadata is aggregated from many sources.

However, metadata quality and consistency is difficult at scale and there may be preservation coverage not recorded here, or in some rare cases we may have content incorrectly matched and marked as preserved. Please alert us if you find any mistakes or inaccuracies.

455	20.58%	preserved and publicly accessible (bright)
379	17.15%	preserved but not publicly accessible (dark)
1,377	62.28%	no known independent preservation
2,211		total

This table is based on KBART reports from large, independent, long-term digital preservation projects. We use the start and stop years of fulltext coverage, then count individuals works as included or not on the basis of year alone (not considering volume or issue metadata). These are mostly "dark" archives, with no direct public access to holdings.

The Keeper's Registry project, currently run by issn.org, is a more authoritative source for aggregated KBART reports, and includes more archives. You can double check the Keeper's entry for this ISSN on portal.issn.org; click through to the "Archival Status" link to see holdings information.

Archive	Year Span(s)
CLOCKSS	2000 to 2000 2008 to 2008
HathiTrust	-

Release Type	Total Count	Coverage
article-journal	2,211

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena `container_mov6v3nt2jgandwiiwsbwumtxq`

Overall Preservation Coverage

Known Holdings Elsewhere

Preservation Coverage by Year

Preservation Coverage by Volume Number