Fatcat About Guide Changelog IA Scholar

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena container_mov6v3nt2jgandwiiwsbwumtxq

American Vacuum Society

Homepage URLs

http://ieeexplore.ieee.org/servlet/opac?punumber=4915583

Example Publications

2,211
Known Releases
Preservation Summary [more]
455 preserved and accessble (bright)
379 preserved, inaccessible (dark)
1,377 no known preservation
Release Types
article-journal 2,211
Publication Type  journal
Country Code  us
ISSN-L?  1071-1023
    Print:  1071-1023
    Electronic:  1520-8567
archive.org  sim_pubid:38085
Directory Listings
Not in DOAJ
Lookup Links
ISSN Portal
The Keepers Registry (preservation)
SHERPA/RoMEO (access policies)
wikidata.org
Catalog Record
Revision: e5307a83-e2c2-43c4-957e-c9aad5233084
API URL: JSON